1 November 2007 High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology
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Optical Engineering, 46(11), 113604 (2007). doi:10.1117/1.2802156
Abstract
To improve upon and provide a methodological alternative to published optoelectronic angle measurement systems, the paper performs high-accuracy angle measurement by use of laser diodes, dual-axis position sensing detectors, and a series of reflections between two first-surface mirrors. Measurement accuracy improves from 0.5 to 0.05 arc sec as the light ray is reflected back and forth several times between the mirrors. Analytic ray tracing is used to model the reflected light ray so as to determine the system equations implicitly in terms of the measured angles. The first-order Taylor series expansion provides a linear form of the system equations. To validate the system, a prototype is built. Calibration and stability experiments are performed. Experimental results show the resolution, accuracy, and measurement range are, respectively, 0.008, 0.05, and ±250 arc sec. Compared with traditional optical angle measurement systems, this method has many merits such as low cost, simple configuration, high sensitivity, and high linearity.
Chun-Jen Chen, Psang Dain Lin, "High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology," Optical Engineering 46(11), 113604 (1 November 2007). http://dx.doi.org/10.1117/1.2802156
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KEYWORDS
Mirrors

Calibration

Autocollimators

Semiconductor lasers

Error analysis

Optical engineering

Optical testing

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