1 March 2007 Noncontact thickness measurement of plane-parallel transparent plates with a lateral shearing interferometer
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Abstract
A technique for determination of the thickness of a plane-parallel transparent plate using a lateral shearing interferometer (LSI) is discussed. With this technique, the parallel plate whose thickness is to be determined is used to introduce a change in the collimation of the retro-reflected beam from an optical setup in which a corrected lens focuses an expanded collimated laser beam on the surface of a plane mirror placed at the back focal plane of the lens. The thickness of the plate is calculated by measuring the defocusing caused by the plate, which is inserted in the beam path between the collimating lens and the plane mirror, with an LSI. Results obtained for a parallel plate are presented.
© (2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Y. Pavan Kumar, Sanjib Chatterjee, "Noncontact thickness measurement of plane-parallel transparent plates with a lateral shearing interferometer," Optical Engineering 46(3), 035602 (1 March 2007). https://doi.org/10.1117/1.2716353 . Submission:
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