1 August 2007 Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results
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Optical Engineering, 46(8), 086501 (2007). doi:10.1117/1.2769325
Abstract
The reflectance effectiveness of a multilayer depends strongly on the stack properties (thickness, roughness, and density of each layer) and can be directly tested by means of x-ray reflectivity scans at definite photon energies. The reflectivity curves are also a powerful tool for the in-depth, nondestructive characterization of the stack structure: The complex task of extracting the stack parameters from reflectivity curves can be achieved via a suitable best-fitting computer code based on a global automatic optimization procedure. We present the computer-assisted layer-by-layer analysis of the characteristics of Ni/C, Pt/C, and W/Si multilayers, based on x-ray reflectivity scans performed at 8.05 and 17.45 keV. In order to verify the correctness of the code predictions, we present also a comparison of the computer model with the transmission electron microscope profiles of the same multilayer samples.
Daniele Spiga, Giovanni Pareschi, Vincenzo Cotroneo, Rodolfo Canestrari, Dervis Vernani, Alessandro Mirone, Claudio Ferrero, Claudio Ferrari, Laura Lazzarini, "Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results," Optical Engineering 46(8), 086501 (1 August 2007). http://dx.doi.org/10.1117/1.2769325
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KEYWORDS
Multilayers

Reflectivity

Transmission electron microscopy

X-rays

Platinum

Silicon

Mirrors

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