1 September 2007 Full-field heterodyne interferometry using a complementary metal-oxide semiconductor digital signal processor camera for high-resolution profilometry
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Abstract
We describe a heterodyne interferometry system based on a complementary metal-oxide semiconductor digital signal processor (CMOS-DSP) camera that is utilized for full-field optical phase measurement using a carrier-based phase retrieval algorithm, with no need for electro-mechanical scanning. Camera characterization test results support the adoption of a single-pixel approach to perform quasi-instantaneous differential phase measurements, which are immune to mechanical vibrations and thermal drifts. We developed an optical configuration based on a Mach-Zehnder heterodyne interferometer to perform a static test on a mirror surface. The profiles of the mirror surface set at two angular positions, the relative displacements in the range of nanometers, and the corresponding tilt angle were determined.
© (2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Mauro V. Aguanno, Fereyduon Lakestani, Maurice Patrick Whelan, Michael J. Connelly, "Full-field heterodyne interferometry using a complementary metal-oxide semiconductor digital signal processor camera for high-resolution profilometry," Optical Engineering 46(9), 095601 (1 September 2007). https://doi.org/10.1117/1.2779346 . Submission:
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