Planar refractive microlens arrays in indium phosphide and quartz substrates

Xinyu Zhang; Changsheng Xie; An Ji; Qingle Tang; Wei Luo

doi:10.1117/1.2931076

1 May 2008 Planar refractive microlens arrays in indium phosphide and quartz substrates

Xinyu Zhang, Changsheng Xie, An Ji, Qingle Tang, Wei Luo

Author Affiliations +

Optical Engineering, Vol. 47, Issue 5, 054001 (May 2008). https://doi.org/10.1117/1.2931076

Abstract

Large-area concave refractive microlens arrays, or concave template structures, and then the non-refractive-index-gradient type of planar refractive microlens arrays in InP and quartz substrates, are fabricated utilizing the method consisting of conventional UV photolithography, thermal shaping of concave photoresist microlenses, etching with an argon ion beam of large diameter, and filling or growing optical medium structures onto the curved surfaces of preshaped concave templates. Several key conditions for fabricating concave and also planar microlenses are discussed in detail. The concave structures obtained are characterized by scanning electron microscope and surface profile measurements. The far-field optical characteristics of quartz/ZrO₂ planar refractive microlens arrays have been acquired experimentally.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Xinyu Zhang, Changsheng Xie, An Ji, Qingle Tang, and Wei Luo "Planar refractive microlens arrays in indium phosphide and quartz substrates," Optical Engineering 47(5), 054001 (1 May 2008). https://doi.org/10.1117/1.2931076

Published: 1 May 2008

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KEYWORDS

Photoresist materials

Microlens

Microlens array

Etching

Ion beams

Indium

Quartz

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