Simultaneous phase-shifting ellipsometry based on grating beamsplitter

Kun Yang; Aijun Zeng; Xiangzhao Wang; Feng Tang; Hua Wang

doi:10.1117/1.2948360

1 June 2008 Simultaneous phase-shifting ellipsometry based on grating beamsplitter

Kun Yang, Aijun Zeng, Xiangzhao Wang, Feng Tang, Hua Wang

Author Affiliations +

Optical Engineering, Vol. 47, Issue 6, 063602 (June 2008). https://doi.org/10.1117/1.2948360

Abstract

Simultaneous phase-shifting ellipsometry based on a grating beamsplitter is presented. In the corresponding setup, an orthogonal grating and analyzer array are used. The latter is composed of four separate analyzers arranged in a 2×2 grid, the polarization axes of which are set to 0, 45, 90, and 135 deg. A mask allows only four diffracted beams of the fist order, having the same optical intensities, to pass. Each beam is incident on one of the analyzers of the array. The intensities of the four beams are simultaneously detected by a quadrant detector. The ellipsometric parameters are obtained using the four intensity signals. The feasibility of simultaneous phase shifting ellipsometry is thus demonstrated.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Kun Yang, Aijun Zeng, Xiangzhao Wang, Feng Tang, and Hua Wang "Simultaneous phase-shifting ellipsometry based on grating beamsplitter," Optical Engineering 47(6), 063602 (1 June 2008). https://doi.org/10.1117/1.2948360

Published: 1 June 2008

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available