Saddle-point construction in the design of lithographic objectives, part 2: application

Oana Marinescu; Florian Bociort

doi:10.1117/1.2981513

1 September 2008 Saddle-point construction in the design of lithographic objectives, part 2: application

Oana Marinescu, Florian Bociort

Author Affiliations +

Optical Engineering, Vol. 47, Issue 9, 093003 (September 2008). https://doi.org/10.1117/1.2981513

Abstract

Optical designers often insert or split lenses in existing designs. Here, we apply in the design of objectives for deep and extreme UV lithography an alternative method for adding new components that consists of constructing saddle points in the optical merit function landscape and obtaining new local minima from them. The design examples show that this remarkably simple method can be easily integrated with traditional design techniques. The new method has significantly improved our design productivity in all cases in which we have applied it so far. High-quality designs of lithographic objectives are obtained with this method.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Oana Marinescu and Florian Bociort "Saddle-point construction in the design of lithographic objectives, part 2: application," Optical Engineering 47(9), 093003 (1 September 2008). https://doi.org/10.1117/1.2981513

Published: 1 September 2008

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