1 January 2008 Material-saving optical waveguide fabrication process with selective transfers of cores
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For reducing the material consumption of optical waveguides for chip-scale optical interconnects, we propose a material-saving optical waveguide fabrication process based on light-assisted selectively occupied repeated transfer (LA SORT). LA SORT enables device elements to be selectively transferred onto a substrate with designed arrangements at one time, using all-photolithographic methods. In the proposed process, optical waveguides are fabricated by transferring cores selectively onto final substrates from a picking-up substrate, on which a high-density core array is placed. Since one picking-up substrate can provide cores to a plurality of final substrates, drastic reduction of waveguide material consumption is expected. The process can also construct complete air-cladding waveguides for fine-pattern optical interconnects. By LA SORT, using films coated with UV-curable material, selective transfers of polymer device elements were achieved. A selective transfer of 32-μm-wide, 3-cm-long polymer cores duplicated by the built-in mask method was demonstrated to provide the proof of concept of the process. We also succeeded in fabricating 4-μm-wide polymer cores with tapered mirrors, and making air-cladding waveguides by transferring the cores. Possible applications of the proposed process to nanoscale optical circuit integration are discussed.
Tetsuzo Yoshimura, Toshiaki Kofudo, Takahiro Kashiwazako, Kaneyuki Naito, Kazuhiro Ogushi, Yohei Kitabayashi, "Material-saving optical waveguide fabrication process with selective transfers of cores," Optical Engineering 47(1), 014601 (1 January 2008). https://doi.org/10.1117/1.2835697

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