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1 April 2008 Fabrication of irregular optical phased arrays on silicon-on-insulator wafers
Feng Xiao, Guangyuan Li, Yanping Li, Anshi Xu
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Optical Engineering, Vol. 47, Issue 4, 040503 (April 2008). https://doi.org/10.1117/1.2902475
Abstract
A 16- and a 32-element irregular optical phased array based on silicon-on-insulator materials were fabricated. Such a device consists of an array of irregularly spaced single-mode waveguides, each of which has a specific length to give an appropriate phase retardation controllable by the wavelength. The optical beam can be steered continuously in the range of about 0 to 3 deg, corresponding to the wavelength varying from 1550.7 to 1551.9 nm.
©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
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Feng Xiao, Guangyuan Li, Yanping Li, and Anshi Xu "Fabrication of irregular optical phased arrays on silicon-on-insulator wafers," Optical Engineering 47(4), 040503 (1 April 2008). https://doi.org/10.1117/1.2902475
Published: 1 April 2008
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Cited by 5 scholarly publications.
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KEYWORDS
Phased array optics
Waveguides
Silicon
Semiconducting wafers
Phased arrays
Beam steering
Integrated optics
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