1 May 2008 Design, fabrication, and test of soft x-ray sinusoidal transmission grating
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Optical Engineering, 47(5), 058001 (2008). doi:10.1117/1.2919717
We present a novel diffractive optical element, the quantum dot array diffraction grating (QDADG), used in soft x-ray spectroscopy. Because of its sinusoidal transmission it effectively suppress higher order diffractions, which can improve the precision and SNR of soft x-ray spectroscopy in laser plasma diagnosis. There are, however, many difficulties in the fabrication of a soft x-ray spectroscopy QDADG because of its small dimensions and complex pattern. We propose a hybrid lithography to fabricate a QDADG, including electron-beam lithography and x-ray lithography. The diffraction property of the QDADG is also proved to be consistent with a theoretical prediction using experiments.
Min Zhao, Xiaoli Zhu, Baoqin Chen, Changqing Xie, Min Liu, Jiebing Niu, Longyu Kuang, Leifeng Cao, "Design, fabrication, and test of soft x-ray sinusoidal transmission grating," Optical Engineering 47(5), 058001 (1 May 2008). https://doi.org/10.1117/1.2919717

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