1 May 2008 Design, fabrication, and test of soft x-ray sinusoidal transmission grating
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We present a novel diffractive optical element, the quantum dot array diffraction grating (QDADG), used in soft x-ray spectroscopy. Because of its sinusoidal transmission it effectively suppress higher order diffractions, which can improve the precision and SNR of soft x-ray spectroscopy in laser plasma diagnosis. There are, however, many difficulties in the fabrication of a soft x-ray spectroscopy QDADG because of its small dimensions and complex pattern. We propose a hybrid lithography to fabricate a QDADG, including electron-beam lithography and x-ray lithography. The diffraction property of the QDADG is also proved to be consistent with a theoretical prediction using experiments.
© (2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
Min Zhao, Min Zhao, Xiaoli Zhu, Xiaoli Zhu, Baoqin Chen, Baoqin Chen, Changqing Xie, Changqing Xie, Min Liu, Min Liu, Jiebing Niu, Jiebing Niu, Longyu Kuang, Longyu Kuang, Leifeng Cao, Leifeng Cao, } "Design, fabrication, and test of soft x-ray sinusoidal transmission grating," Optical Engineering 47(5), 058001 (1 May 2008). https://doi.org/10.1117/1.2919717 . Submission:

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