1 June 2008 Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering
Author Affiliations +
Optical Engineering, 47(6), 064001 (2008). doi:10.1117/1.2939091
Abstract
ZnO thin films were grown on SiO2/Si substrates by radio-frequency magnetron sputtering. Based on the ZnO film, a photoconductive metal-semiconductor-metal ultraviolet detector was fabricated by a liftoff technique. Its I-V characteristics were observed at 365 nm, and a fast response was observed by illumination with a KrF excimer laser.
Xuming Bian, Jingwen Zhang, Zhen Bi, Dong Wang, Xin'an Zhang, Xun Hou, "Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering," Optical Engineering 47(6), 064001 (1 June 2008). http://dx.doi.org/10.1117/1.2939091
JOURNAL ARTICLE
4 PAGES


SHARE
KEYWORDS
Zinc oxide

Ultraviolet detectors

Sputter deposition

Sensors

Thin films

Oxygen

Ultraviolet radiation

RELATED CONTENT


Back to Top