1 March 2009 Modular bimorph mirrors for adaptive optics
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This paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom from silicon wafers with bimorph piezoelectric actuation. The mirror may be used on its own, or as a segment of a larger mirror. The typical size of one segment is 100 to 200 mm; the production process relies on silicon wafers and thick film piezoelectric material deposition technology; it is able to lead to an actuation pitch of the order of 5 mm, and the manufacturing costs appear to grow only slowly with the number of degrees of freedom in the adaptive optics.
© (2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
Gonçalo N. M. Rodrigues, Gonçalo N. M. Rodrigues, Renaud P. Bastaits, Renaud P. Bastaits, Stephane Roose, Stephane Roose, Yvan Stockman, Yvan Stockman, Sylvia E. Gebhardt, Sylvia E. Gebhardt, Andreas J. Schönecker, Andreas J. Schönecker, Pierre Villon, Pierre Villon, André J. Preumont, André J. Preumont, } "Modular bimorph mirrors for adaptive optics," Optical Engineering 48(3), 034001 (1 March 2009). https://doi.org/10.1117/1.3099716 . Submission:

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