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1 June 2009 Computer-generated hologram cavity interferometry test for large x-ray mirror mandrels: design
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A glancing-incidence interferometric test for large x-ray mirror mandrels, using two computer-generated holograms (CGHs), is described. The two CGHs are used to form a double-pass glancing-incidence system. One layout of the CGH-cavity glancing-incidence interferometer is studied and factors relating to its design are analyzed. A semianalytical expression for the phase function is derived that avoids high-order ripple errors and improves the efficiency of the CGH pattern generation. A system of coarse and fine fiducials for establishing the CGH-cavity and aligning the tested mandrel is discussed. Compared with traditional measurement devices, such as coordinate measuring machines (CMMs) or other scanning metrology systems, the CGH-cavity glancing-incidence interferometer can measure a mandrel surface without mechanical contact, at a high spatial sampling frequency, with lower uncertainty, and at high speed.
©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
Guangjun Gao, John P. Lehan, William W. Zhang, Ulf Griesmann, and Johannes Soons "Computer-generated hologram cavity interferometry test for large x-ray mirror mandrels: design," Optical Engineering 48(6), 063602 (1 June 2009).
Published: 1 June 2009


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