Fabrication of three-dimensional photonic crystals using autocloning layers on the self-assembled microspheres

Te-Hung Chang; Sheng-Hui Chen; Chia-Hua Chan; Yu-Wen Yeh; Shih-Liang Ku; Cheng-Chung Lee; Chii-Chang Chen; Chao-Chun Huang

doi:10.1117/1.3183906

1 July 2009 Fabrication of three-dimensional photonic crystals using autocloning layers on the self-assembled microspheres

Te-Hung Chang; Sheng-Hui Chen; Chia-Hua Chan; Yu-Wen Yeh; Shih-Liang Ku; Cheng-Chung Lee; Chii-Chang Chen; Chao-Chun Huang

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Optical Engineering, 48(7), 073401 (2009). https://doi.org/10.1117/1.3183906

Abstract

A novel technique was proposed to fabricate a three-dimensional photonic crystal by self-assembling microspheres and the autocloning technology. The autocloning thin-film layers were superimposed on the prepared two-dimensional structural substrates using self-assembled microspheres. The thin-film process allows the three-dimensional periodic structure to be easily modified in the thickness dimension to structure as needed. We analyzed the etching effect using the unified process model according to the surface movement and surface velocity of the film to achieve the surface profile of the SiO₂ adjusting layer. Finally, 17 layers of Ta₂O₅/SiO₂ multilayers were stacked on the SiO₂ adjusting layer successfully.

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Te-Hung Chang, Te-Hung Chang, Sheng-Hui Chen, Sheng-Hui Chen, Chia-Hua Chan, Chia-Hua Chan, Yu-Wen Yeh, Yu-Wen Yeh, Shih-Liang Ku, Shih-Liang Ku, Cheng-Chung Lee, Cheng-Chung Lee, Chii-Chang Chen, Chii-Chang Chen, Chao-Chun Huang, Chao-Chun Huang, } "Fabrication of three-dimensional photonic crystals using autocloning layers on the self-assembled microspheres," Optical Engineering 48(7), 073401 (1 July 2009). https://doi.org/10.1117/1.3183906 . Submission:

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