1 July 2009 Submicroradian laser beam angular scan precision measurement by interference method
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Abstract
Laser beam angular scan accuracy measurement plays an important role in many fields. A sub-microradian laser beam scan precision measurement method that utilizes the wavefront interference method with a Zygo interferometer is proposed. The experimental results show that the measurement accuracy is approximately 0.04 μrad, and the new method is very effective and feasible.
© (2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
Jianfeng Sun, Jianfeng Sun, Liren Liu, Liren Liu, Anhu Li, Anhu Li, Deyan Xu, Deyan Xu, } "Submicroradian laser beam angular scan precision measurement by interference method," Optical Engineering 48(7), 073607 (1 July 2009). https://doi.org/10.1117/1.3183943 . Submission:
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