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1 July 2009 Submicroradian laser beam angular scan precision measurement by interference method
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Abstract
Laser beam angular scan accuracy measurement plays an important role in many fields. A sub-microradian laser beam scan precision measurement method that utilizes the wavefront interference method with a Zygo interferometer is proposed. The experimental results show that the measurement accuracy is approximately 0.04 μrad, and the new method is very effective and feasible.
©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
Jianfeng Sun, Liren Liu, Anhu Li, and Deyan Xu "Submicroradian laser beam angular scan precision measurement by interference method," Optical Engineering 48(7), 073607 (1 July 2009). https://doi.org/10.1117/1.3183943
Published: 1 July 2009
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