Two new types of semiconductor image position sensitive device (PSD) are proposed. One is a separate photoelectric device type of PSD that reduces image position sensing errors caused by the influence of noise light, such as background light, which cannot be removed by conventional signal light modulating methods. The other is a semiconductor dark image PSD that can detect the position of dark target image against a bright background. These new types of PSD can be realized with configurations similar to the conventional PSD. Simulation results demonstrated that the new types of PSD are effective for accurate spot image position sensing.