Novel high sensitivity accelerometer based on a microfiber loop resonator

Chang-Lun Hou; Yu Wu; Xu Zeng; Shuangshuang Zhao; Qiaofen Zhou; Guoguang Yang

doi:10.1117/1.3294883

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1 January 2010 Novel high sensitivity accelerometer based on a microfiber loop resonator

Chang-Lun Hou, Yu Wu, Xu Zeng, Shuangshuang Zhao, Qiaofen Zhou, Guoguang Yang

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Optical Engineering, 49(1), 014402 (2010). https://doi.org/10.1117/1.3294883

Abstract

An optical accelerometer with a bulk-micromachined silicon proof mass and a microfiber loop resonator (MLR) sensor was developed. The MLR was fixed on the surface of the cantilever beam. The proof mass and cantilever beam were fabricated with a two-mask process. An accelerometer with a range of ±20 g and output sensitivity 624.7 mV/g was fabricated. The design, simulation, fabrication, and preliminary results are presented.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Chang-Lun Hou, Yu Wu, Xu Zeng, Shuangshuang Zhao, Qiaofen Zhou, and Guoguang Yang "Novel high sensitivity accelerometer based on a microfiber loop resonator," Optical Engineering 49(1), 014402 (1 January 2010). https://doi.org/10.1117/1.3294883

Published: 1 January 2010

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