1 January 2010 Analysis of the focal pattern distortion of a cylindrical concave micro-grating in a slab waveguide and the mechanism of spatial resolution recovery
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Abstract
With modern lithographic technology, a compact spectrometer is designed to include a blazed micro-grating with cylindrical concave grating profile. In order to restrict the sagittal beam divergence and to reduce the size of the spectrometer, the micro-grating is embedded inside a pair of planar mirrors used as a slab waveguide. In the simulations for the effect of the waveguide, we discover that the focal pattern distortion introduced by the waveguide causes a blunted and side-tailed peak in the spectrum. The distortion can be managed by allowing some gap between the edge of the waveguide and the image sensor. Such a configuration has greatly improved the resolving power of the micro-grating in this compact system.
© (2010) Society of Photo-Optical Instrumentation Engineers (SPIE)
Cheng Hao Ko, Jian-Shian Lin, Nien-Po Chen, Chang-Tai Chen, Ji-Lin Shen, "Analysis of the focal pattern distortion of a cylindrical concave micro-grating in a slab waveguide and the mechanism of spatial resolution recovery," Optical Engineering 49(1), 018001 (1 January 2010). https://doi.org/10.1117/1.3290241 . Submission:
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