1 February 2010 Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications
Author Affiliations +
Abstract
We propose a common-path two-wavelength interferometric system based on a single optical element, a Savart plate, that is able to obtain single-shot profile measurements with submicron precision from safe working distances (beyond 100 mm). These characteristics make this sensor ideal for surface inspection in on-line applications. For the illumination branch, two lasers with close wavelengths are combined and then passed through a rotating holographic diffuser for drastic speckle reduction. In the acquisition branch, the interferometric signals of both wavelengths are captured simultaneously by a camera, and their phase signals are combined to extend the measurement range.
© (2010) Society of Photo-Optical Instrumentation Engineers (SPIE)
José Maria Enguita, Ignacio Álvarez, María Frade Rodriguez, Jorge Marina, "Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications," Optical Engineering 49(2), 023602 (1 February 2010). https://doi.org/10.1117/1.3321709 . Submission:
JOURNAL ARTICLE
8 PAGES


SHARE
Back to Top