Singular beam scanning microscopy: preliminary experimental results

Boris Spektor; Alexander Normatov; Joseph Shamir

doi:10.1117/1.3381180

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1 April 2010 Singular beam scanning microscopy: preliminary experimental results

Boris Spektor, Alexander Normatov, Joseph Shamir

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Optical Engineering, 49(4), 048001 (2010). https://doi.org/10.1117/1.3381180

Abstract

High-sensitivity and a high-speed nanoscale measurement is an important subject in modern industry, especially when analysis of high-speed moving nanoscale objects on a surface is required. Several objectives in this direction can be achieved by using singular beam microscopy, which we investigate experimentally for the examination of small phase steps. We discuss the challenges of rigorous modeling of experiments employing high-numerical-aperture illumination and describe experimental results performed with a medium numerical aperture of 0.55. The investigated equivalent phase step heights reached as low as 10 nm (about 1/15 rad).

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Boris Spektor, Alexander Normatov, and Joseph Shamir "Singular beam scanning microscopy: preliminary experimental results," Optical Engineering 49(4), 048001 (1 April 2010). https://doi.org/10.1117/1.3381180

Published: 1 April 2010

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