Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes

Samuel K. Barber; Erik H. Anderson; Rossana Cambie; Stefano Marchesini; Wayne R. McKinney; Peter Z. Takacs; Dmitry L. Vorornov; Valeriy Yashchuk

doi:10.1117/1.3431659

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1 May 2010 Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes

Samuel K. Barber, Erik H. Anderson, Rossana Cambie, Stefano Marchesini, Wayne R. McKinney, Peter Z. Takacs, Dmitry L. Vorornov, Valeriy Yashchuk

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Optical Engineering, 49(5), 053606 (2010). https://doi.org/10.1117/1.3431659

Abstract

The major problem of measurement of a power spectral density (PSD) distribution of surface heights with surface profilometers arises due to the unknown modulation transfer function (MTF) of the instruments, which tends to distort the PSD at higher spatial frequencies. The special mathematical properties of binary pseudo-random patterns make them an ideal basis for developing MTF calibration test surfaces. Two-dimensional binary pseudo-random arrays have been fabricated and used for the MTF calibration of the MicroMap^TM-570 interferometric microscope with all available objectives. An investigation into the effects of fabrication imperfections on the quality of the MTF calibration and a procedure for accounting for such imperfections are presented.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Samuel K. Barber, Erik H. Anderson, Rossana Cambie, Stefano Marchesini, Wayne R. McKinney, Peter Z. Takacs, Dmitry L. Vorornov, and Valeriy Yashchuk "Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes," Optical Engineering 49(5), 053606 (1 May 2010). https://doi.org/10.1117/1.3431659

Published: 1 May 2010

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