1 July 2010 Calcium barium niobate ridge waveguide on silicon substrate
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Abstract
A novel optical ridge waveguide using calcium barium niobate (CBN) with a high electro-optic coefficient on silicon substrate is proposed for the design and realization of the next-generation hybrid modulators with short length and low driving voltage. To overcome the etching difficulty of CBN, the design of a waveguide, including an elevated CBN layer based on etched silicon dioxide, is presented. Fabrication of a thick 2.5-µm CBN layer is performed using pulsed laser deposition. Deposited silicon dioxide on the sides and top of the CBN reduces the waveguide loss as low as 3.44 dB/cm, measured using a cutback method. Good agreement between the mode profiles of the simulation and measurement is obtained.
© (2010) Society of Photo-Optical Instrumentation Engineers (SPIE)
Ebrahim Mortazy, Irina Stateikina, Amirhossein Tehranchi, Sebastien Delprat, Mohamed Chaker, Ke Wu, "Calcium barium niobate ridge waveguide on silicon substrate," Optical Engineering 49(7), 074601 (1 July 2010). https://doi.org/10.1117/1.3463020 . Submission:
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