1 July 2010 Calcium barium niobate ridge waveguide on silicon substrate
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Abstract
A novel optical ridge waveguide using calcium barium niobate (CBN) with a high electro-optic coefficient on silicon substrate is proposed for the design and realization of the next-generation hybrid modulators with short length and low driving voltage. To overcome the etching difficulty of CBN, the design of a waveguide, including an elevated CBN layer based on etched silicon dioxide, is presented. Fabrication of a thick 2.5-µm CBN layer is performed using pulsed laser deposition. Deposited silicon dioxide on the sides and top of the CBN reduces the waveguide loss as low as 3.44 dB/cm, measured using a cutback method. Good agreement between the mode profiles of the simulation and measurement is obtained.
© (2010) Society of Photo-Optical Instrumentation Engineers (SPIE)
Ebrahim Mortazy, Ebrahim Mortazy, Irina Stateikina, Irina Stateikina, Amirhossein Tehranchi, Amirhossein Tehranchi, Sebastien Delprat, Sebastien Delprat, Mohamed Chaker, Mohamed Chaker, Ke Wu, Ke Wu, } "Calcium barium niobate ridge waveguide on silicon substrate," Optical Engineering 49(7), 074601 (1 July 2010). https://doi.org/10.1117/1.3463020 . Submission:
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