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Two-step ion-exchanged waveguides with high surface refractive indices are fabricated under a variety of conditions. By modifying the conventional two-step ion exchange, the losses and the effective diffusion depth can be decreased without a significant effect on the surface refractive index. The influence of the first step, K+-Na+ ion exchange, performed time dependably on the surface refractive index change is investigated. Energy-dispersive x-ray spectroscopy is performed to establish the diffusion profiles of various ions.
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