1 January 2011 Stylus profilometry for steep aspheric surfaces with multisegment stitching
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A multisegment stitching method is proposed to get the profile of steep aspheric surfaces with even 90-deg edge slope. The profile is divided into several segments overlapping each other, and the segments are measured with a high-precision stylus profilometer one by one. Then an iterative algorithm is used to stitch all of the segments together, based on the minimization of inconsistency among the overlapping regions. A convex hyperbolic surface is measured with three-segment stitching, and the result is approved by full-profile testing. We also demonstrate the method with a steep elliptical surface, measured and stitched by five segments. Finally, discussions are given on the error introduced by sagittal displacement of the segments.
© (2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Yifan Dai, Yifan Dai, Shanyong Chen, Shanyong Chen, Shengyi Li, Shengyi Li, Hao Hu, Hao Hu, Qi Zhang, Qi Zhang, } "Stylus profilometry for steep aspheric surfaces with multisegment stitching," Optical Engineering 50(1), 013601 (1 January 2011). https://doi.org/10.1117/1.3518072 . Submission:

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