1 October 2011 High diffraction order grating interferometer for pitch measurement
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Abstract
A grating interferometer that uses the high diffraction orders in conjunction with a Twyman-Green commercial interferometer is used for the measurement of in plane movement of gratings. The high diffraction orders ensures the amplification of the measurement precision with a factor equal to the diffraction order of the measurement in principle, because no imaging of features marking the beginning and the end of the measured length feature is necessary, and therefore the resolution limits associated with microscope imaging are eliminated.
© (2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Dan Apostol, Cristian V. Udrea, Florin Garoi, Tiberius N. Vasile, Petre Catalin Logofatu, "High diffraction order grating interferometer for pitch measurement," Optical Engineering 50(10), 105601 (1 October 2011). https://doi.org/10.1117/1.3633332 . Submission:
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