Electroactive polymer-based spatial light modulator with high reliability and fast response speed

Guangmin Ouyang; Kaiying Wang; Xuyuan Chen; Lars Henriksen

doi:10.1117/1.3659216

1 December 2011 Electroactive polymer-based spatial light modulator with high reliability and fast response speed

Guangmin Ouyang; Kaiying Wang; Xuyuan Chen; Lars Henriksen

Author Affiliations +

Optical Engineering, 50(12), 124001 (2011). https://doi.org/10.1117/1.3659216

Abstract

An electroactive polymer (EAP)-based MOEMS spatial light modulator (SLM), which shows high reliability and fast response speed, is reported in this work. The reliability is achieved by designing the SLM without direct contact between electrodes and deformable EAP surface; while the fast response speed is obtained by optimizing the microstructure of the EAP material. The concept of SLM, material optimization approach, fabrication processes, as well as characterization methods, are described. The SLM is driven by relatively low voltage, which is 200 V dc and 60 V ac and the response time is 35 μs. The manufactured SLM shows no degradation or breakdown after millions of actuation cycles, indicating a good reliability of the device.

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Guangmin Ouyang, Guangmin Ouyang, Kaiying Wang, Kaiying Wang, Xuyuan Chen, Xuyuan Chen, Lars Henriksen, Lars Henriksen, } "Electroactive polymer-based spatial light modulator with high reliability and fast response speed," Optical Engineering 50(12), 124001 (1 December 2011). https://doi.org/10.1117/1.3659216 . Submission:

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