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1 May 2011 High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles
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Abstract
We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.
©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Takeshi Nakazawa, José Sasián, and Francy K. Abraham "High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles," Optical Engineering 50(5), 053603 (1 May 2011). https://doi.org/10.1117/1.3574399
Published: 1 May 2011
JOURNAL ARTICLE
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