1 July 2011 High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules
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Abstract
For optical axis alignment when light deflection control of a MEMS mirror is done at high speed, we propose a method based on identifying the quadratic surface shape. The method uses information about the optical power monitored when the mirror is inclined to a small angle. It is shown that the search for maximum optical power is possible by using this method. We also designed a control system with a band-stop filter for resonance frequency to decrease residual vibration generated when the mirror is moved at high speed. We confirm that the searchable level of optical power can be improved.
© (2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Masato Mizukami, Joji Yamaguchi, Naru Nemoto, "High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules," Optical Engineering 50(7), 074001 (1 July 2011). https://doi.org/10.1117/1.3594787 . Submission:
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