1 September 2011 Demonstration of state-locked control of tiled system
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Abstract
The stability of phased-array optics is a crucial issue for far-field focal-spot quality. The tiled approach of phasing optical elements is a widely used technique. Here it is adopted to maintain the long-time stability of a tiled system by a proportional-integral-differential (PID) algorithm. Experimental data is taken with 2×1 tiled-flat square mirrors driven by 3-axis piezoelectric actuators. The feedback frequency is over 80 Hz and the displacement error is below 4 nm. The optical measurement results show that the state-locked operation is continuously maintained for hour-long periods in PID control mode.
© (2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Yuchuan Yang, Xiao Wang, Junwei Zhang, Fuquan Li, Xiaojun Huang, Feng Jing, Hui Luo, "Demonstration of state-locked control of tiled system," Optical Engineering 50(9), 093601 (1 September 2011). https://doi.org/10.1117/1.3615648 . Submission:
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