1 September 2011 Demonstration of state-locked control of tiled system
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The stability of phased-array optics is a crucial issue for far-field focal-spot quality. The tiled approach of phasing optical elements is a widely used technique. Here it is adopted to maintain the long-time stability of a tiled system by a proportional-integral-differential (PID) algorithm. Experimental data is taken with 2×1 tiled-flat square mirrors driven by 3-axis piezoelectric actuators. The feedback frequency is over 80 Hz and the displacement error is below 4 nm. The optical measurement results show that the state-locked operation is continuously maintained for hour-long periods in PID control mode.
© (2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Yuchuan Yang, Yuchuan Yang, Xiao Wang, Xiao Wang, Junwei Zhang, Junwei Zhang, Fuquan Li, Fuquan Li, Xiaojun Huang, Xiaojun Huang, Feng Jing, Feng Jing, Hui Luo, Hui Luo, } "Demonstration of state-locked control of tiled system," Optical Engineering 50(9), 093601 (1 September 2011). https://doi.org/10.1117/1.3615648 . Submission:

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