Corrective capability analysis and machining error control in ion beam figuring of high-precision optical mirrors

Wenlin Liao; Yifan Dai; Xuhui Xie; Lin Zhou; Zheng Yuan

doi:10.1117/1.OE.51.3.033402

13 March 2012 Corrective capability analysis and machining error control in ion beam figuring of high-precision optical mirrors

Wenlin Liao, Yifan Dai, Xuhui Xie, Lin Zhou, Zheng Yuan

Author Affiliations +

Optical Engineering, Vol. 51, Issue 3, 033402 (March 2012). https://doi.org/10.1117/1.OE.51.3.033402

Abstract

In deterministic ion beam figuring (IBF) technology, the application of small ion beam enhances the corrective capability for mid-to-high spatial frequency errors on the optical surface, which directly determines the surface accuracy of the figuring process. But when the diameter of the ion beam becomes smaller, the machining errors will have a stronger influence on the final figuring result, so these errors must be controlled through corresponding methods. We investigate the corrective principle in IBF for surface errors of different spatial frequencies and establish the selection criterion for removal function in different figuring stages to realize the rapid convergence of surface accuracy. Then, through analyzing and controlling the machining errors in the figuring process, high-precision mirrors can be rapidly obtained. Finally, experiments on fused silica planar and spherical samples are conducted on our self-developed IBF system, and their final surface accuracy are both smaller than 1.1 nm RMS (root-mean-square) and 12.0 nm PV (Peak-to-Valley) after several iterations within 20 min.

Citation Download Citation

Wenlin Liao, Yifan Dai, Xuhui Xie, Lin Zhou, and Zheng Yuan "Corrective capability analysis and machining error control in ion beam figuring of high-precision optical mirrors," Optical Engineering 51(3), 033402 (13 March 2012). https://doi.org/10.1117/1.OE.51.3.033402

Published: 13 March 2012

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