5 July 2012 Vanadium oxide microbolometer with gold black absorbing layer
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Abstract
Vanadium oxide uncooled bolometer with gold black absorber of high long-wave-infrared-rays absorption has been fabricated and optimized. The fabrication processes for mirobolometer were developed with surface micromachining below 350°C. We evaluated gold black film reflectance by Fourier transform infrared spectroscopy. Low reflectance shows that gold black has good absorption at 8 to 14 μm infrared window. Detector tests show that a bolometer with gold black absorber, compared with the one without gold black, had better performance, with maximum responsivity and detectivity of 8.4×104  V/W and 6.16×108  cm Hz1/<2/W, respectively, at 13 Hz chopper frequency and bias current 67 μA.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE)
Bin Wang, Jianjun Lai, Sihai Chen, Erjing Zhao, Haoming Hu, Qian Lu, "Vanadium oxide microbolometer with gold black absorbing layer," Optical Engineering 51(7), 074003 (5 July 2012). https://doi.org/10.1117/1.OE.51.7.074003 . Submission:
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