7 January 2013 Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics
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Abstract
This paper presents a low-cost silicon unimorph deformable mirror (DM) that will be used for astronomical adaptive optics. The device has a simple construction consisting of a 400-μm-thick silicon wafer and a 200-μm-thick lead zirconate titanate film, with 214 actuators and 50-mm active aperture. The actuator displacement of the fabricated device is about 1 μm at 50 V. And the resonance frequency is 550 Hz. The simulation and experimental generation of Zernike mode shapes indicate that the fabricated DM has an excellent correction performance for both low order and high order aberrations.
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
Jianqiang Ma, Jianqiang Ma, Ying Liu, Ying Liu, Yanlei Hu, Yanlei Hu, Chen Xu, Chen Xu, Baoqing Li, Baoqing Li, Jiaru Chu, Jiaru Chu, } "Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics," Optical Engineering 52(1), 016602 (7 January 2013). https://doi.org/10.1117/1.OE.52.1.016602 . Submission:
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