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14 March 2013 Methodology for optimal in situ alignment and setting of bendable optics for nearly diffraction-limited focusing of soft x-rays
Daniel J. Merthe, Valeriy V. Yashchuk, Kenneth A. Goldberg, Martin Kunz, Nobumichi Tamura, Wayne R. McKinney, Nikolay A. Artemiev, Richard S. Celestre, Gregory Y. Morrison, Erik H. Anderson, Brian V. Smith, Edward E. Domning, Senajith B. Rekawa, Howard A. Padmore
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Optical Engineering, Vol. 52, Issue 3, 033603 (March 2013). https://doi.org/10.1117/1.OE.52.3.033603
Abstract
We demonstrate a comprehensive and broadly applicable methodology for the optimal in situ configuration of bendable soft x-ray Kirkpatrick-Baez mirrors. The mirrors used for this application are preset at the Advanced Light Source Optical Metrology Laboratory prior to beamline installation. The in situ methodology consists of a new technique for simultaneously setting the height and pitch angle of each mirror. The benders of both mirrors were then optimally tuned in order to minimize ray aberrations to a level below the diffraction-limited beam waist size of 200  nm (horizontal)×100  nm (vertical) . After applying this methodology, we measured a beam waist size of 290  nm (horizontal)×130  nm (vertical) with 1 nm light using the Foucault knife-edge test. We also discuss the utility of using a grating-based lateral shearing interferometer with quantitative wavefront feedback for further improvement of bendable optics.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Daniel J. Merthe, Valeriy V. Yashchuk, Kenneth A. Goldberg, Martin Kunz, Nobumichi Tamura, Wayne R. McKinney, Nikolay A. Artemiev, Richard S. Celestre, Gregory Y. Morrison, Erik H. Anderson, Brian V. Smith, Edward E. Domning, Senajith B. Rekawa, and Howard A. Padmore "Methodology for optimal in situ alignment and setting of bendable optics for nearly diffraction-limited focusing of soft x-rays," Optical Engineering 52(3), 033603 (14 March 2013). https://doi.org/10.1117/1.OE.52.3.033603
Published: 14 March 2013
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Cited by 17 scholarly publications.
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KEYWORDS
Mirrors
Wavefronts
X-rays
Optical alignment
In situ metrology
X-ray optics
Charge-coupled devices
CHORUS Article. This article was made freely available starting 14 March 2014
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