20 March 2013 Measurement system of dynamic microscopic deformation for membrane based on fringe projection
Author Affiliations +
Optical Engineering, 52(3), 033604 (2013). doi:10.1117/1.OE.52.3.033604
The bulge test has been utilized extensively in determining the mechanical properties of thin film materials. We develop a bulge-test system that consists of three main components, including an optical system, a loading system, and a control system. A telecentric lens is adopted as an imaging camera in an optical system to provide high imaging quality along with a constant angle of view across the entire field of view. The out-of-plane deformation is obtained by projecting a sinusoidal fringe pattern onto a specimen surface and analyzing recorded images with a digital image correlation algorithm. A least-squares polynomial fitting is presented to solve the problem that the out-of-plane calibration coefficient is not a constant. Experiments were performed to validate the availability and reliability of this proposed bulge-test system in the measurement of a dynamic microscopic deformation of membrane. The measuring range of deformation is from several microns to hundreds of microns with an accuracy of 0.6 μm.
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
Feipeng Zhu, Dong Lei, Xiaoyuan He, "Measurement system of dynamic microscopic deformation for membrane based on fringe projection," Optical Engineering 52(3), 033604 (20 March 2013). https://doi.org/10.1117/1.OE.52.3.033604


Imaging systems

Dynamical systems

Digital image correlation

Fringe analysis

CCD cameras

Control systems


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