9 August 2013 Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method
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Optical Engineering, 52(8), 085101 (2013). doi:10.1117/1.OE.52.8.085101
Abstract
A method to obtain the absolute shape of a large plane or sphere surface in the subaperture testing with multiangle averaging and Zernike polynomial fitting method is proposed. The subaperture data obtained by the interferometer contain not only the test mirror deviation but also the reference surface deviation. The reference surface deviation has become the main limit of the subaperture testing accuracy. To correct the deviation, the measurements are made so that the reference deviation could be eliminated by rotational asymmetric deviation and the rotational symmetric deviation. This technique can get not only the full absolute shape of the large mirrors, but also the reference surface shape. Experimental results have been given to verify the effectiveness of this method.
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
Fengtao Yan, Bin Fan, Xi Hou, Fan Wu, "Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method," Optical Engineering 52(8), 085101 (9 August 2013). https://doi.org/10.1117/1.OE.52.8.085101
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KEYWORDS
Interferometers

Mirrors

Zernike polynomials

Calibration

Photovoltaics

Optical spheres

Distortion

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