Internal modification for cutting transparent glass using femtosecond Bessel beams

Wu-Jung Tsai; Chun-Jen Gu; Chung-Wei Cheng; Ji-Bin Horng

doi:10.1117/1.OE.53.5.051503

2 December 2013 Internal modification for cutting transparent glass using femtosecond Bessel beams

Wu-Jung Tsai, Chun-Jen Gu, Chung-Wei Cheng, Ji-Bin Horng

Author Affiliations +

Optical Engineering, Vol. 53, Issue 5, 051503 (December 2013). https://doi.org/10.1117/1.OE.53.5.051503

Abstract

Taking advantage of the nonlinear laser-material interaction, femtosecond lasers can process transparent materials internally on micro- or nanoscales, whose applications include fabrication of micro-optical waveguides and fluidics, as well as stealth dicing of glass, ceramics, and semiconductor materials. A femtosecond Bessel beam has a long invariant transverse intensity profile up to several millimeters with a width of a few microns. Such characteristics allow the materials processing to be completed without moving the beam focusing points as in the case of the Gaussian beam. An experimental femtosecond Bessel beam microprocessing system is built up to investigate the glass internal modification characteristics, such as the width variation and aspect ratios of modification areas. The residual stresses in the irradiated area of glass after modification are also studied using micro Raman spectrum. Finally, an application to thin glass panel cutting is demonstrated by the process of internal modification and breaking. The glass panel is well cut with the chipping on the breaking edge <1 μm.

Citation Download Citation

Wu-Jung Tsai, Chun-Jen Gu, Chung-Wei Cheng, and Ji-Bin Horng "Internal modification for cutting transparent glass using femtosecond Bessel beams," Optical Engineering 53(5), 051503 (2 December 2013). https://doi.org/10.1117/1.OE.53.5.051503

Published: 2 December 2013

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available