18 December 2014 Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation
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Abstract
A method for simple and reliable displacement measurement with nanoscale resolution is proposed. The measurement is realized by combining a common optical microscopy imaging of a specially coded nonperiodic microstructure, namely two-dimensional zero-reference mark (2-D ZRM), and subsequent correlation analysis of the obtained image sequence. The autocorrelation peak contrast of the ZRM code is maximized with well-developed artificial intelligence algorithms, which enables robust and accurate displacement determination. To improve the resolution, subpixel image correlation analysis is employed. Finally, we experimentally demonstrate the quasi-static and dynamic displacement characterization ability of a micro 2-D ZRM.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Wei Huang, Wei Huang, Chengfu Ma, Chengfu Ma, Yuhang Chen, Yuhang Chen, } "Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation," Optical Engineering 53(12), 124103 (18 December 2014). https://doi.org/10.1117/1.OE.53.12.124103 . Submission:
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