28 May 2014 Multistep-shaping control based on the static and dynamic behavior of nonlinear optical torsional micromirror
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Electrostatically driven torsional micromirrors are suitable for optical microelectromechanical systems due to their good dynamic response, low adhesion, and simple structure for large-scale-integrated applications. For these devices, how to eliminate the excessive residual vibration in order to achieve more accurate positioning and faster switching is an important research topic. Because of the known nonlinearity issues, traditional shaping techniques based on linear theories are not suitable for nonlinear torsional micromirrors. In addition, due to the difficulties in calculating energy dissipation, the existing nonlinear command shaping techniques using energy method have neglected the effect of damping. We analyze the static and dynamic behavior of the electrostatically actuated torsional micromirrors. Based on the response of these devices, a multistep-shaping control considering the damping effects and the nonlinearity is proposed. Compared to the conventional closed-loop control, the proposed multistep-shaping control is a feedforward approach which can yield a good enough performance without extra sensors and actuators. Simulation results show that, without changing the system structure, the preshaping input reduces the settling time from 4.3 to 0.97 ms, and the overshoot percentage of the mirror response is decreased from 33.2% to 0.2%.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Cheng Bai, Cheng Bai, Jin Huang, Jin Huang, } "Multistep-shaping control based on the static and dynamic behavior of nonlinear optical torsional micromirror," Optical Engineering 53(5), 057109 (28 May 2014). https://doi.org/10.1117/1.OE.53.5.057109 . Submission:

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