3 June 2014 Flat-top distribution of excimer laser using ultrasonic grating
Author Affiliations +
Abstract
A model to achieve flat-top distribution of ultraviolet (UV) excimer laser is presented. Reserving the practically lossless superiority in the traditional diffraction approach, the method improves a diffraction grating with a controllable grating period based on the acousto-optic diffraction effect. A theoretical analysis extending the Huygens–Fresnel principle and Gauss Schell model describing a typically partial coherent source of excimer is proposed, so that a fast Fourier transform numerical simulation could be utilized to calculate the optimized Raman–Nath comprehensive parameter of the acousto-optic medium. Such an excimer homogenous technology could be wisely used in UV lithography and micromachining.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Liang Lei, Liang Lei, Xin Liu, Xin Liu, Xiaobo Xing, Xiaobo Xing, Qu Wang, Qu Wang, } "Flat-top distribution of excimer laser using ultrasonic grating," Optical Engineering 53(6), 065102 (3 June 2014). https://doi.org/10.1117/1.OE.53.6.065102 . Submission:
JOURNAL ARTICLE
6 PAGES


SHARE
RELATED CONTENT

Excimer laser deposition of super-hard coatings
Proceedings of SPIE (February 17 2010)
Kilowatt Excimer Lasers: A European Joint Effort
Proceedings of SPIE (April 25 1989)
Materials Surface Processing With Excimer Lasers
Proceedings of SPIE (July 11 1988)
History and future prospects of excimer lasers
Proceedings of SPIE (February 24 2002)

Back to Top