Improved iterative algorithm for the three-flat test

Bo Gao; Qiang Li; Yuhang He; Liqun Chai

doi:10.1117/1.OE.53.9.092004

16 April 2014 Improved iterative algorithm for the three-flat test

Bo Gao, Qiang Li, Yuhang He, Liqun Chai

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Optical Engineering, Vol. 53, Issue 9, 092004 (April 2014). https://doi.org/10.1117/1.OE.53.9.092004

Abstract

An iterative algorithm has been successfully used to process data from the three-flat test. On the basis of the iterative algorithm proposed by Vannoni, which is much faster and more effective than the Zernike polynomial fitting method, an improved algorithm is presented. By optimizing the iterative steps and removing the scaling factors, the surface shape can be easily computed in a few iterations. The validity of the method is proved by computer simulation, and the interpolation error and principle error are analyzed.

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Bo Gao, Qiang Li, Yuhang He, and Liqun Chai "Improved iterative algorithm for the three-flat test," Optical Engineering 53(9), 092004 (16 April 2014). https://doi.org/10.1117/1.OE.53.9.092004

Published: 16 April 2014

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