11 August 2014 In situ and ex situ characterization of optical surfaces by light scattering techniques
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Abstract
The continuous development of optical technologies and the accompanying requirements on the manufacturing process place challenging demands on metrology. In addition to highly sensitive and robust measurement techniques, the inspection tools should be fast and capable of characterizing large and complex-shaped surfaces. These aspects can be addressed by light-scattering-based characterization techniques, which also enable a large flexibility for the measurement conditions because of the noncontact data acquisition and are, thus, suited not only for
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Marcus Trost, Tobias Herffurth, Sven Schröder, Angela Duparré, Matthias Beier, Stefan Risse, Andreas Tünnermann, Norbert R. Bowering, "In situ and ex situ characterization of optical surfaces by light scattering techniques," Optical Engineering 53(9), 092013 (11 August 2014). https://doi.org/10.1117/1.OE.53.9.092013 . Submission:
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