7 December 2015 Modeling and simulation of the effect of surface roughness on properties of silicon-on-insulator optical ring resonator coupled with a straight waveguide
Hui Zhang, Tong Li, Aoqun Jian, Shengbo Sang, Chenyang Xue, Wendong Zhang
Author Affiliations +
Abstract
This paper describes a relatively general method based on finite-difference time-domain for modeling the scattering loss of silicon nano-optical waveguides as well as quality factor Q of the waveguide resonators. This paper explains how the surface roughness affects the performance of silicon-on-insulator optical ring resonators. Furthermore, the model we built in this paper was also employed to design and optimize the structure of an optical resonator and a good match was found between calculated and measured data. Also, our results were compared with those obtained by other approaches, again proving that the model worked well.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2015/$25.00 © 2015 SPIE
Hui Zhang, Tong Li, Aoqun Jian, Shengbo Sang, Chenyang Xue, and Wendong Zhang "Modeling and simulation of the effect of surface roughness on properties of silicon-on-insulator optical ring resonator coupled with a straight waveguide," Optical Engineering 54(12), 125101 (7 December 2015). https://doi.org/10.1117/1.OE.54.12.125101
Published: 7 December 2015
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Waveguides

Resonators

Scattering

Surface roughness

Silicon

Modeling and simulation

Finite-difference time-domain method

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