14 December 2015 Si-based infrared optical filters
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Abstract
Pyramidal silicon nanospikes, termed black-Si (b-Si), with controlled height of 0.2 to 1  μm, were fabricated by plasma etching over 3-in wafers and were shown to act as variable density filters in a wide range of the IR spectrum 2.5 to 20  μm, with transmission and its spectral gradient dependent on the height of the spikes. Such variable density IR filters can be utilized for imaging and monitoring applications. Narrow IR notch filters were realized with gold mesh arrays on Si wafers prospective for applications in surface-enhanced IR absorption sensing and “cold materials” for heat radiation into atmospheric IR transmission window. Both types of filters for IR: spectrally variable and notch are made by simple fabrication methods.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Armandas Balčytis, Armandas Balčytis, Meguya Ryu, Meguya Ryu, Gediminas Seniutinas, Gediminas Seniutinas, Yoshiaki Nishijima, Yoshiaki Nishijima, Yuta Hikima, Yuta Hikima, Massimiliano Zamengo, Massimiliano Zamengo, Raimondas Petruškevičius, Raimondas Petruškevičius, Junko Morikawa, Junko Morikawa, Saulius Juodkazis, Saulius Juodkazis, } "Si-based infrared optical filters," Optical Engineering 54(12), 127103 (14 December 2015). https://doi.org/10.1117/1.OE.54.12.127103 . Submission:
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