5 August 2015 High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry
Author Affiliations +
Abstract
The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1  nm root-mean-square accuracy for the surface measurement with low-order term included.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Run Huang, Run Huang, Peng Su, Peng Su, James H. Burge, James H. Burge, Lei Huang, Lei Huang, Mourad Idir, Mourad Idir, } "High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry," Optical Engineering 54(8), 084103 (5 August 2015). https://doi.org/10.1117/1.OE.54.8.084103 . Submission:
JOURNAL ARTICLE
10 PAGES


SHARE
Back to Top