19 January 2016 Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry
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Abstract
The internal shape and alignment of accelerator discs is crucial for efficient collider operation at the future compact linear collider (CLIC). We applied a calibrated custom-made Fourier-domain short coherence interferometer to measure the height of 40 and 60  μm ultraprecisely turned steps (surface roughness Ra≤25  nm, flatness ≤2  μm) on an oxygen-free electronic copper disc. The step heights were quantified to be (39.6±2.6)  μm and (59.0±2.3)  μm. The uncertainties are quoted at 95% confidence level and include contributions from calibration, refractive index of air, cosine error, surface roughness, and thermal expansion in comparison to standard temperature of 20°C. The results were verified by measuring the same steps using a commercial white light interferometer Veeco—NT3300. Our instrument can ensure that the accelerator discs of the CLIC are aligned within the tolerance required for efficient collider operation.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Risto Montonen, Ivan Kassamakov, Edward Hæggström, Kenneth Österberg, "Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry," Optical Engineering 55(1), 014103 (19 January 2016). https://doi.org/10.1117/1.OE.55.1.014103 . Submission:
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