8 August 2016 Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion
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Abstract
Different methods for the measurement of in-plane and out-of-plane nanodisplacements of microscopic samples are discussed and compared. It is shown that correlation methods are suited for in-plane displacement measurements and can achieve accuracies of a few nanometers. The method based on vortices tracking can be used for in-plane displacement measurements, but its accuracy is lower compared with the intensity correlation method. The holographic methods allow the measurement of in-plane and out-of-plane displacements at the same time; but in this case, a quite complex setup is required. A combination of correlation methods for in-plane measurement and digital holography for out-of-plane plane measurements is also discussed. The accuracy of the different methods was determined by comparison with a calibrated reference.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Alok Kumar Singh, Giancarlo Pedrini, Xiang Peng, Wolfgang Osten, "Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion," Optical Engineering 55(12), 121722 (8 August 2016). https://doi.org/10.1117/1.OE.55.12.121722 . Submission:
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