16 December 2016 Absolute measurement for optical inhomogeneity of parallel plate using phase-shifting interferometry
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Abstract
Optical inhomogeneity is an important index to evaluate optical transmission material. We propose an absolute measurement method for optical inhomogeneity of the parallel plate with phase-shifting interferometry (PSI). Compared with the window-flipping method, we introduce another transmission flat and add two cavity measurements between the two transmission flats and the reflective flat with the assistance of a Fizeau interferometer. Simulation and experiment results show that the method can effectively eliminate the disturbances of both surfaces of the parallel plate, the reflective flat, and the system error of the interferometer. It reduces the requirement for surface accuracy of the transmission and reflective flats. It is an absolute measurement method for the optical inhomogeneity of the parallel plate, which can be realized with traditional phase-shifting interferometry.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Donghui Zheng, Donghui Zheng, Lei Chen, Lei Chen, Qinyuan Sun, Qinyuan Sun, Wenhua Zhu, Wenhua Zhu, Jinpeng Li, Jinpeng Li, Jianxin Li, Jianxin Li, } "Absolute measurement for optical inhomogeneity of parallel plate using phase-shifting interferometry," Optical Engineering 55(12), 124103 (16 December 2016). https://doi.org/10.1117/1.OE.55.12.124103 . Submission:
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